CenturaI Phase2 Mainframe
1. Mainframe - Chamber Tray (4 Ch. Interface)
2. HP+ Robot Ass'y
3. Wide Body Loadlock
4. Orienter and Multi Cool Down Chamber
5. 1 x DxZ Process Chamber
6. Gas Panel - 4 Chamber Pallet - Top Feed Gas Box - Not Included : Regulator, Air Valve, MFC and Inteface
System Controller
1. 84" System Controller & A.C Rack
2. Test: System Power on & Wafer Transfer Test
Generator Rack without Generator