Equipment
Parts
Product
Global supplier for obsoleted semiconductor equipment and parts.
Technical Specs
· Type
Vacuum Gauge
· Sensor Type
Convection-enhanced Pirani
· Measurement Range
1.0 x 10-4 to 760 Torr
· Fitting Type
4 VCR female
· Filament
Gold Plated Tungsten
· Exposed Materials
304 stainless steel, borosilicate glass, Kovar®, Alumina, NiFe alloy, polyimide
· Bake Out Temperature
150°C
· Operating Temperature
4 - 50°C
· Installation Orientation
Horizontal preferred
· Internal Volume
35 cm3 (2.14 in3)
· Maximum Internal Pressure
150 psi
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