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Centura® DPS+ Metal

  • ConfigurationCentura®2 Mainframe, VHP Robot, 2xDPS+ Metal Chamber,2 x ASP+ Chamber + VDS,Throttle&Gate Valve,Fast Cool Down,Orienter,WBLL
  • Serial Number-
  • Vintage-
  • Wafer Size200mm
  • Tool IDRPCE2-01
  • ConditionRefurbish In Process
  • Warranty3 Months Part Warranty
  • Terms of ShipmentEXW
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Configuration


Centura® DPS+ Metal


   o  Centura®2 Mainframe 

   o   VHP Robot

   o   2 x DPS+ Metal Chamber

   o   Throttle Valve

   o   Gate Valve

   o   2 x ASP+ Chamber + VDS

   o   Throttle Valve

   o   Gate Valve

   o   Fast Cool Down

   o   Orient Chamber

   o   Wide Body Lord Lock

  

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