Configuration
Mirra® + Mesa® + FABS®+ System Control
POLISHER
o 2 Slurry Line
o 3 Ports UPA
o Pentium III
o 4 HEAD
o 3 PLATENS
o 3 PAD CONDITIONER
o 1 CROSS
o 1 FULL CONTACT HCLU
CLEANER
o MEGASONIC LDM_DIRECT TYPE
o BRUSH #1 LDM: DIRECT TYPE
o BRUSH #2 LDM: DIRECT TYPE
FABS® (New TL RPF)
o New PC Type with New Window OS (100% competible with Rorze FABs®)
o 3 PORTS SMIF TYPE or 4 POPRTS OPEN CASSETTE TYPE