Product

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MIRRA MESA®

  • ConditionUsed, Refurbished
  • ConfigurationMirra® + Mesa® + FABS® + System Control
  • Wafer Size8"
  • Tool IDRPM
  • Stock1
  • Warranty3 Months Parts Warranty
  • DeliveryTo be discussed
  • Terms of ShipmentEXW
Inquiry

Configuration


 Mirra® + Mesa® + FABS®+ System Control


 POLISHER

    

  o   2 Slurry Line

  o   3 Ports UPA

  o   Pentium III

  o   4 HEAD

  o   3 PLATENS

  o   3 PAD CONDITIONER

  o   1 CROSS

  o   1 FULL CONTACT HCLU

 

 CLEANER


  o   MEGASONIC LDM_DIRECT TYPE

  o   BRUSH #1 LDM: DIRECT TYPE

  o   BRUSH #2 LDM: DIRECT TYPE


 FABS® (New TL RPF)

 

  o    New PC Type with New Window OS (100% competible with Rorze FABs®)

  o   3 PORTS SMIF TYPE or 4 POPRTS OPEN CASSETTE TYPE


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