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Centura® PVD : SOLD

  • Serial No.-
  • Vintage-
  • Wafer200mm (8")
  • MainframeHP Robot, Widebody Loadlock
  • Chamber Ti, TaN, PreClean II, Cooling, DGAS Orienter
  • System ControllerAll Boards, 208V, 50/60Hz. 144kW
  • Generator RackAE MDX-L6, AE MDX-L12, RFPP LF10A, COmdel CPS1001S
  • Includes2 x Edward QDP40, 1 x CTI 9600 compressor, 1 x Neslab Chiller
  • ConditionDeinstalled & Warehouse
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SOLD

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