Configuration

 Endura® Mainframe + System Controller + Generaotr + Main AC Rack

 ·       Mainframe®

  o   Buffer Chamber : HP Robot (No Cryo Pump)

  o   Transfer Chamber : VHP Lid Only (No VHP Robot/Driver, No Cryo Pump) , 25' umblical for Main frame

  o   WBLL : 25 slot, Auto Tilt-Out

      Chamber

  o   CH#A : PassThru / CH#B: Cooldown / CH#C: Blank

  o   CH#D: Blank / CH#E: Blank / CH#F: Wafer Orient/Degas

  o   CH#1: Blank / CH#2 : Blank / CH#3 : Blank / CH#4 : Blank

  o   Slit Valves Accurator and Chamber Inserts // 5 Sets for Chamber 1,2,3,4 & 1 PCII Chamber

 ·       System Controller® 

  o   SBC V452 B/D & OMS VMEX Frame

  o   Ion Gauge Controller // * 24,15V Power Supply

 ·       Generator Rack® 

  o   Excluding DC Power Supply & Generator5

 ·       Main AC Rack® 

  o   Long Body