Configuration

1. DESCRIPTION 

1-1. Process : AL, Ti/TiN 

1-2. Model : Endura® PVD System 

1-3. Wafer & Carrier Type : 8" 25 Slots.

2    

S      2. SYSTEM CONFIGURATION

2-1. Mainframe 

*    Buffer : HP Robot / Transfer Chamber : VHP Robot

*    Widebody Loadlock

-    25 slot, Auto Tilt-Out

*2-2. Chamber

CH#A : PassThru

CH#B : Cooldown

CH#C : Preclean II

CH#D : Blank 

CH#E : Wafer Orient/Degas 

CH#F : Blank 

CH#1 : Blank 

CH#2 : Standard AL

CH#3 : Wide Ti

CH#4 : Wide Ti

2-2. System Controller 

* SBC V452 B/D & OMS VMEX Frame

2P & 5P Driver Box

* Ion Gauge Controller

* CTI Network Terminal

* 24,15V Power Supply

3. Main AC Transfermor : 480V /150kva

4. Generator Rack x 1ea

5. Umblical Cable Leagth 75ft